Mattson
Aspen II
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Mattson Aspen II Asher is a semiconductor ashing tool made by Mattson. The Aspen II supports 6-inch and 8-inch wafer sizes in different configurations. The Aspen II is a legacy tool with vintage variants from 1994 and 1996.[1][2][3][4]
What it is
What do the numbers mean?
Wafer handling7
Configuration & options11
- Convertible to 8"[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Aspen II (6 inch) | — | — | Supports 6-inch wafers only. | Equipment inventory listing[1] |
| Aspen II (6/8 inch) | — | — | Supports both 6-inch and 8-inch wafers. | Equipment inventory listing[2] |
| Aspen II (no size specified) | — | — | No wafer size specified in source. | Equipment inventory listing[5] |
| Aspen II (1994 vintage) | — | 1994–1994 | Vintage variant from 1994, 6-inch wafer size. | Equipment inventory listing[3] |
| Aspen II (1996 vintage) | — | 1996–1996 | Vintage variant from 1996, 6-inch wafer size. | Equipment inventory listing[4] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Mattson Aspen II support?
The Mattson Aspen II supports 6-inch and 8-inch wafers, with a configuration that is convertible between those sizes.[1][2]
Not publicly documented
The following facts about the Aspen II are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Aspen II are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Aspen II are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Aspen II are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Aspen II is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Aspen II are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (8)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Equipment inventory listing
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]Inventory photo
- [8]Mattson Technology - Products — mattson.com (Jun 17, 2000)web.archive.org
Last updated Sep 25, 2026.