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IPLE 4 - 0700 Lapper Polisher Plate

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

IPLE 4 - 0700 Lapper Polisher Plate — Inventory photo
Fig. 01IPLE 4 - 0700 Lapper Polisher PlateInventory photo[1]

What it is

General reference — not yet source-verified

A lapper polisher plate is a component used in chemical mechanical planarization (CMP) systems to hold and rotate a polishing pad against the surface of a semiconductor wafer. The plate provides the mechanical base for the polishing process, which removes material to achieve global planarization of the wafer surface.

How it works

General reference — not yet source-verified

Lapper polisher plates of this class are rotating platens that support a replaceable polishing pad. During operation, the plate is rotated while a wafer carrier presses the wafer face-down onto the pad. A chemical slurry is dispensed onto the pad, and the combination of mechanical abrasion and chemical etching removes material from the wafer surface in a controlled manner.

Where it fits in the process flow

General reference — not yet source-verified

In semiconductor fabrication, lapper polisher plates are used in the chemical mechanical planarization (CMP) process step. CMP is employed to planarize interlayer dielectrics, shallow trench isolation structures, metal interconnect layers, and other deposited films before subsequent lithography and etching processes. The plate is part of the CMP tool that performs this critical planarization step.

What do the numbers mean?

Configuration & options2

35cm Plate[1]
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Diameter
35cm[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the model number of this lapper polisher plate?

The model is Logitech IPLE 4 - 0700.[1]

Not publicly documented

The following facts about the IPLE 4 - 0700 Lapper Polisher Plate are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the IPLE 4 - 0700 Lapper Polisher Plate are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IPLE 4 - 0700 Lapper Polisher Plate are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IPLE 4 - 0700 Lapper Polisher Plate are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IPLE 4 - 0700 Lapper Polisher Plate are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IPLE 4 - 0700 Lapper Polisher Plate are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Sep 22, 2026.

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