Leybold

IBS 1400 HT GT Dual Ion Beam

Deposition Leybold IBS 1400 HT GT Dual Ion Beam family

Research Quality: 30% complete

IBS 1400 HT GT Dual Ion Beam — Inventory photo — Fig. 01IBS 1400 HT GT Dual Ion BeamInventory photo^[1]

What is it?

The Leybold IBS 1400 HT GT is a dual ion beam sputtering system with a 4-position target tower, KRI sputter and assist sources, an optical monitor, a planetary substrate carrier, test glasses, a ceramic plate substrate heater, and front and rear doors.

What do the numbers mean?

Wafer handling3

4 x 35 0mm planetary substrate carrier (2 x 530 mm planets can also be installed)^[1]

Accurate?

Two test glasses (with shutter) on the substrate carrier for complex process monitoring schemes^[1]

Accurate?

Ceramic plate substrate heater^[1]

Accurate?

Optics & imaging1

OMS5100i direct optical monitor (as installed in the HELIOS)^[1]

Accurate?

Configuration & options3

4 position target tower with 3 target positions (optional 4th target)^[1]

Accurate?

Main KRI sputter source and additional KRI assist source^[1]

Accurate?

Front and rear doors^[1]

Accurate?

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the IBS 1400 HT GT Dual Ion Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IBS 1400 HT GT Dual Ion Beam are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the IBS 1400 HT GT Dual Ion Beam are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the IBS 1400 HT GT Dual Ion Beam are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IBS 1400 HT GT Dual Ion Beam are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IBS 1400 HT GT Dual Ion Beam is not on record.
Answerable by: an OEM datasheet or a fab qualification report