Waferpedia

Laurell

WS-650-8 B

The Laurell WS-650-8 B is a spin coater in the 650-series. The Laurell WS-650-8 B has a maximum substrate size of 200mm (7" x 7"). The Laurell WS-650-8 B has a maximum speed of 12000 rpm.[1]

LaurellWS-650-8 B
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What it is

The Laurell WS-650-8 B is a spin coater in the 650-series resist-processing class.[1]

How it works

General reference — not yet source-verified

A spin coater holds a substrate on a rotating chuck and uses centrifugal force to spread a liquid film across the surface.

Spin coating is used to form uniform thin liquid layers on flat substrates before subsequent thermal or exposure steps.

Where it fits in the process flow

The WS-650-8 B can be used in tabletop, in-deck, or on-deck mounting configurations.[1]

Applications

General reference — not yet source-verified

The WS-650-8 B is suitable for coating flat substrates that require a controlled thin film.

What do the numbers mean?

Wafer handling1

Max. Substrate Size
200mm (7" x 7")[1]
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Control & software1

Controller
650-series[1]
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Configuration & options5

OEM
Laurell[1]
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Model
WS-650-8 B[1]
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Type
Spin Coater[1]
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Max. RPM
12000 rpm[1]
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Mounting Options
Tabletop, In-Deck, On-deck[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the WS-650-8 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-8 B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the WS-650-8 B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the WS-650-8 B are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WS-650-8 B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WS-650-8 B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]images.laurell.com — images.laurell.comimages.laurell.com
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Last updated Oct 7, 2026.

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