Waferpedia

Laurell

WS-650-23B

Resist Processing150mmLaurell WS-650-23B family
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The Laurell WS-650-23B is a spin coater used for depositing thin films by centrifugal force. The WS-650-23B handles substrates up to ø150 mm (5"×5") and spins at up to 12,000 RPM (based on a ø100 mm silicon wafer).[1][2]

WS-650-23B — laurell.com
Fig. 01WS-650-23Blaurell.com[3]

Wafer size

150mm

Power

95 to 240 VAC, 47/63 Hz, ~300 W[4]

Vacuum

60–70 PSIG (4–5 bar)[4]

What it is

The Laurell WS-650-23B is a 650-series spin coater for processing wafers and other flat substrates.[3][1][2]

The WS-650-23B accommodates wafers up to ø 150 mm and substrates up to 5 inch by 5 inch, and it has a maximum rotational speed of 12,000 RPM.[3][1][2]

How it works

The WS-650-23B uses a vacuum chuck and wafer alignment tools to center the substrate on the chuck during processing.[1][4]

The WS-650-23B uses a 650-series process controller with PC software support, and the controller allows real-time operator interaction during a run.[1][4]

Where it fits in the process flow

The WS-650 series is used for coating, etching, developing, rinsing-drying, and cleaning, and the model page also identifies solvent, base, and acid-based processing as typical uses.[1][4]

Applications

The WS-650-23B is used for coating, etching, developing, rinsing-drying, and cleaning.[1][4]

The WS-650-23B can use removable, reusable process chamber liners made from FEP Teflon, and a PTFE housing is available for elevated-temperature chemistry.[1][4]

What do the numbers mean?

Power & electrical1

Power requirement
95 to 240 VAC, 47/63 Hz, ~300 W[4]
Accurate?

Vacuum & pumping2

Nitrogen purge pressure
60–70 PSIG (4–5 bar)[4]
Accurate?
Vacuum requirement
25–28 inches Hg (~635–711 mm Hg) at 4.5 SCFM[4]
Accurate?

Wafer handling2

Max substrate size
ø150mm (5" × 5")[3]
Accurate?
Max rotational speed
12,000 RPM (based on a ø100 mm silicon wafer)[1]
Accurate?

Control & software2

Controller
650 Series[3]
Accurate?
Controller type
650-series microprocessor controller with optional PC/Spin 3000 software[1]
Accurate?

Configuration & options5

Model
WS-650-23B[3]
Accurate?
Type
spin coater[3]
Accurate?
Max RPM
12,000 rpm[3]
Accurate?
Mounting options
Tabletop, In-Deck, On-Deck[3]
Accurate?
Housing material
Solid co-polymer blend (standard); optional PTFE Hostaflon TFM-1600 / Teflon AF[1]
Accurate?
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What replaced it?

  • siblingLaurell EDC-650-23B— Same substrate size and RPM but different type (Spin Coater vs EDC System) within the 650 Seriessource[3]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power requirement95 to 240 VAC, 47/63 Hz, ~300 W[4]
  • Nitrogen purge pressure60–70 PSIG (4–5 bar)[4]
  • Vacuum requirement25–28 inches Hg (~635–711 mm Hg) at 4.5 SCFM[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What substrate sizes does the WS-650-23B handle?

The WS-650-23B accommodates wafers up to ø 150 mm and substrates up to 5 inch by 5 inch.[3][1][2]

What is the maximum rotational speed of the WS-650-23B?

The WS-650-23B has a maximum rotational speed of 12,000 RPM.[3][1][2]

What processes are supported on the WS-650-23B?

The WS-650 series is used for coating, etching, developing, rinsing-drying, and cleaning.[1][4]

Does the WS-650-23B support wafer alignment tools?

The WS-650-23B can use Laurell wafer alignment tools to center wafers on vacuum chucks.[1][4]

Not publicly documented

The following facts about the WS-650-23B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-23B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the WS-650-23B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the WS-650-23B are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WS-650-23B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WS-650-23B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]laurell.com — laurell.comlaurell.com
  2. [2]Spin Coater - Laurell Model WS-650-23B — 2k10.laurell.com2k10.laurell.com
  3. [3]laurell.com — laurell.comlaurell.com
  4. [4]laurell.com — laurell.comlaurell.com
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Last updated Oct 9, 2026.

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