Headway
PWM32
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The PWM32 is a programmable spin controller used to coat substrates at adjustable spinning speeds from 50 to 10,000 RPM. The PWM32 runs processes as recipes identified by numbers 0 through 9, each composed of up to 9 steps, with per-step timers settable from 0 to 999.9 seconds. The PWM32 has been upgraded by Headway and the new product is now called model PWM50.[1][2]
Plate 01Headway Research PWM32/CB-15, Spin Coater/ Wet Bench. Inv# 63217
Bid ServicellcWatch on YouTubePlate 02Headway Research Spinner PWM32 컨트롤러 테스트 영상!
주식회사 엔지니어스톡Watch on YouTube
What it is
How it works
The PWM32 runs process recipes made of numbered steps, and each step can use a timer that terminates the step when the set time expires.[1]
The PWM32 manages chuck vacuum automatically or under operator override, and the controller can also coordinate accessory exhaust control and a powered lid when those options are present.[1][4]
Where it fits in the process flow
Applications
The PWM32 is used for coating substrates such as silicon wafers and small photomasks.[4]
The PWM32 is also used with broader spin-processing setups that include developers and fluid dispensing for photoresist and other high-purity fluids.[2]
- Spinner control
What do the numbers mean?
Power & electrical1
- Accessory power supply
- 24 VDC supplied by the controller for accessories such as the HDP98 fluid dispenser[2]
Vacuum & pumping4
- Vacuum control
- Automatic vacuum to chuck with manual override; rotation sensor forces vacuum on while motor is spinning[1]
- Optional accessories
- Powered lid (pneumatic actuator), substrate lifter/alignment tool, exhaust damper and bowl cover for closed-chamber inhibited drying spin coating, portable stand[4]
Wafer handling5
Optics & imaging1
- BD motor speed
- Up to 2,500 rpm, for heavy loads such as compact disk masters, thick E-beam masks, LCD panels[4]
Control & software8
Configuration & options7
Vintage & configurations
- 2022Upgraded to PWM50[2]
The PWM32 Spin Controller had been upgraded and the new product was called PWM50.
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| PWM32-PS-CB15 | — | — | Up to 10,000 rpm; for relatively light loads such as silicon wafers and small photomasks; CB15 bowl with 15-inch I.D. and recommended substrate limits stated in the source. | headwayresearch.com[4] |
| PWM32-PS-R790 | — | — | Up to 10,000 rpm for relatively light loads such as silicon wafers and small photomasks; substrates up to a 5-inch maximum. | headwayresearch.com[4] |
| PWM32-BD-CB15 | — | — | Up to 2,500 rpm for heavy loads such as compact disk masters, thick E-beam masks, LCD panels, and substrates requiring high inertia chucks; substrates up to a recommended 12-inch maximum. | headwayresearch.com[4] |
| PWM32-BD-LS22 | — | — | For substrates larger than 12 inches, or for heavy substrates at higher than 2,500 rpm; LS22 described as the next larger bowl. | headwayresearch.com[4] |
| PWM32 Spin Controller | — | — | Described as the model that was upgraded and renamed PWM50. | web.archive.org[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum controlAutomatic vacuum to chuck with manual override; rotation sensor forces vacuum on while motor is spinning[1]
- Accessory power supply24 VDC supplied by the controller for accessories such as the HDP98 fluid dispenser[2]
- Optional accessoriesPowered lid (pneumatic actuator), substrate lifter/alignment tool, exhaust damper and bowl cover for closed-chamber inhibited drying spin coating, portable stand[4]
- Vacuum controlautomatic or manual, with rotation override[1]
- Exhaust controloptional automatic control via program[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the PWM32 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the PWM32 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PWM32 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PWM32 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PWM32 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the PWM32 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]mrl.illinois.edu — mrl.illinois.edumrl.illinois.edu
- [4]headwayresearch.com — headwayresearch.comheadwayresearch.com
- [5]Wayback Machine — web.archive.orgweb.archive.org
- [6]HEADWAY PWM32 PHOTORESIST COATER - J.M. Industries — jmind.comjmind.com
Last updated Sep 23, 2026.