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FormFactor

CM 300 xi

FormFactor CM 300 xi family
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FormFactor CM 300 xi is a 300 mm semi-/fully-automated probe station. FormFactor CM 300 xi supports Contact Intelligence for autonomous semiconductor test. FormFactor CM 300 xi can handle up to fifty 200 mm or 300 mm wafers in SEMI-standard wafer cassettes.[1]

FormFactorCM 300 xi
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What it is

The FormFactor CM 300 xi is a 300 mm probe station in FormFactor's probe systems line.[1][2]

The CM300xi-ULN is a 300 mm probe station for ultra low noise measurements.[3]

How it works

The CM300xi with Loader is a fully automated probe station.[1]

The CM300xi-SiPh is a semi- and fully automated probe system with an Autonomous Silicon Photonics Measurement Assistant.[4]

Where it fits in the process flow

The CM300xi family supports engineering and production probing applications on 300 mm wafers.[1][3]

Applications

The CM300xi family is used for semiconductor test and measurement applications.[1][3]

The CM300xi-SiPh supports silicon photonics wafer-level edge coupling and die-level probing.[4]

What do the numbers mean?

Wafer handling3

Wafer size
300 mm[1]
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Wafer handling capacity
Up to fifty 200 mm or 300 mm wafers[1]
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Cassette type
SEMI-standard wafer cassettes[1]
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Performance1

Optional alignment feature
ReAlign off-axis probe-to-pad alignment[1]
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Configuration & options9

OEM
FormFactor[2]
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Model
CM 300 xi[2]
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Product type
300 mm semi-/fully-automated probe system[1]
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Automation
Semi-automated and fully-automated[1]
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Contact Intelligence
Supported[1]
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Temperature range
-60°C to +300°C[1]
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MicroChamber environment
EMI-shielded, light-tight and moisture-free test environment[1]
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Variant designation
CM300xi-ULN[3]
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ULN product type
300 mm probe station for ultra low noise measurements[3]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
CM300xi-ULN——Ultra low noise version for flicker noise, RTN or RTS, and phase noise measurements.formfactor.com[3]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the CM300xi family support?

The CM300xi family is a 300 mm probe station platform.[1][3][4]

Is the CM300xi automated?

The CM300xi with Loader is a fully automated probe station, and the CM300xi-SiPh is a semi- and fully automated probe system.[1][4]

Not publicly documented

The following facts about the CM 300 xi are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CM 300 xi are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the CM 300 xi are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the CM 300 xi are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the CM 300 xi is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the CM 300 xi are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]formfactor.com — formfactor.comformfactor.com
  2. [2]Equipment inventory listing
  3. [3]formfactor.com — formfactor.comformfactor.com
  4. [4]FormFactor - Cascade CM300xi-SiPh - 300 mm semi-/ fully-automated probe system with Autonomous Silicon Photonics Measurement Assistant | PSI Solutions, Inc. — psirep.compsirep.com
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Last updated Oct 7, 2026.

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