Filmetrics
F80-A
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedFilm thickness mapping tools of this class use spectral reflectance to measure the thickness of thin films on a substrate.
Where it fits in the process flow
The Filmetrics F80-A is used in semiconductor manufacturing for in-line product-wafer metrology, specifically to measure film thickness on patterned wafers.[1]
Applications
The F80-A is applied to patterned wafers for product-wafer metrology in semiconductor fabs.[1]
- Patterned wafers
- Product-wafer metrology
What do the numbers mean?
Wafer handling2
- Functionality
- Integrates full F80 functionality with Ricmar's WTT 300 Wafer Transfer Tool[2]2 sources
Configuration & options3
Vintage & configurations
- 2010Production start[1]
Introduced 2010
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the F80-A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the F80-A are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the F80-A are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F80-A are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F80-A is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F80-A are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]web.archive.org — web.archive.orgweb.archive.org
Last updated Oct 11, 2026.