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Filmetrics

F30

thin-film thickness measurement instrumentFilmetrics F30 family
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The Filmetrics F30 is an in-situ thin-film thickness measurement instrument. The Filmetrics F30 measures deposition rates, film thickness, optical constants (n and k), and uniformity. The Filmetrics F30 uses a spectral reflectance system.[1][2]

F30 — web.archive.org
Fig. 01F30web.archive.org[1]

What it is

The Filmetrics F30 is a thin-film thickness measurement instrument.[1][2][3]

The Filmetrics F30 is an in-situ spectral reflectance system for monitoring thin-film deposition.[1][2][3]

How it works

The Filmetrics F30 measures deposition rates, layer thickness, optical constants, and uniformity in real time.[1][2][3]

The Filmetrics F30 measures semiconductors and dielectric layers from outside the deposition chamber.[1][2][3]

Where it fits in the process flow

The Filmetrics F30 is positioned for real-time monitoring of thin-film deposition.[1][2][3]

Applications

The Filmetrics F30 measures semiconductors and dielectric layers.[1][2][3]

The Filmetrics F30 can measure smooth and translucent films and lightly absorbing films.[1][2][3]

The Filmetrics F30 includes example coverage for MBE and MOCVD films and semiconducting materials from AlGaN to GaInAsP.[1][2][3]

  • thin-film deposition monitoring
  • semiconductors
  • dielectric layers
  • MOCVD

What do the numbers mean?

Optics & imaging2

measurements
deposition rates, layer thickness, optical constants (n and k), and uniformity[1]
Accurate?
Measures
Deposition rates, film thickness, optical constants (n and k), and uniformity[2]
Accurate?

Control & software1

software
Intuitive Windows software[1]
Accurate?

Configuration & options8

measurement method
spectral reflectance system[1]
Accurate?
target materials
semiconductors and dielectric layers[1]
Accurate?
measurement context
real-time thin-film deposition monitoring[1]
Accurate?
film types mentioned
smooth and translucent, or lightly absorbing films[1]
Accurate?
example materials
virtually any semiconducting material, from AlGaN to GaInAsP[1]
Accurate?
Instrument type
In-situ thickness measurement instrument[2]
Accurate?
Observed materials
Semiconductors and dielectric layers[2]
Accurate?
Operating context
Totally outside of deposition chamber[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What does the Filmetrics F30 measure?

The Filmetrics F30 measures deposition rates, film thickness, optical constants, and uniformity.[1][2][3]

What kinds of films can the Filmetrics F30 measure?

The Filmetrics F30 can measure smooth and translucent films, lightly absorbing films, semiconductors, and dielectric layers.[1][2][3]

Where does the Filmetrics F30 operate in the process flow?

The Filmetrics F30 operates in real time during thin-film deposition and is used outside the deposition chamber.[1][2][3]

Not publicly documented

The following facts about the F30 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F30 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the F30 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the F30 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the F30 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the F30 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]Filmetrics F30 System — premier-sols.compremier-sols.com
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Last updated Oct 4, 2026.

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