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Espec

EHS-412MD

Test & ProbeEspec EHS-412MD family
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The Espec EHS-412MD is a large highly accelerated stress test system. The Espec EHS-412MD has an interior size of φ294×L318 mm ×2stage. The Espec EHS-412MD operates over +105.0°C to +162.2°C, 75%rh to 100%rh, and 0.019 to 0.389 MPa (gauge).[1]

EspecEHS-412MD
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What is it?

The Espec EHS-412MD is listed in the highly accelerated stress test system lineup. The Espec EHS-412MD is the large-type model with a standard mechanical door lock mechanism and a door lock safety mechanism. The Espec EHS-412MD is specified for +105.0°C to +162.2°C, 75%rh to 100%rh, and 0.019 to 0.389 MPa (gauge).

What can it run?

Process applications and technology nodes documented for this tool.

  • Highly accelerated stress testing

What do the numbers mean?

Vacuum & pumping1

Pressure range
0.019 to 0.389 MPa (gauge)[1]
Accurate?

Dimensions & facilities1

Interior dimensions
φ294×L318 mm ×2stage[1]
Accurate?

Configuration & options3

Category
Highly accelerated stress test system[1]
Accurate?
Temperature range
+105.0°C to +162.2°C[1]
Accurate?
Humidity range
75%rh to 100%rh[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
EHS-412(M)——Listed as the related single-stage model in the same lineup; the EHS-412MD is the two-stage version with the same stated temperature, humidity, and pressure range.espec.co.jp[1]
EHS-432(M)——Listed in the larger-size highly accelerated stress test system lineup.espec.co.jp[1]
EHS-212(M)——Listed in the standard highly accelerated stress test system lineup.espec.co.jp[1]
EHS-222(M)——Listed in the standard highly accelerated stress test system lineup.espec.co.jp[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Pressure range0.019 to 0.389 MPa (gauge)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the EHS-412MD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EHS-412MD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the EHS-412MD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the EHS-412MD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the EHS-412MD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the EHS-412MD are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]espec.co.jp — espec.co.jpespec.co.jp
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Last updated Oct 9, 2026.

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