Edwards
E 306 A
The Edwards E 306 A is a coater. The Edwards E 306 A uses a CT-200 cryopump and an oil based Edwards roughing pump. The Edwards E 306 A includes an ion gauge.[1][2]
What it is
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Thermal baskets need to be replaced as they are expendable items.
What do the numbers mean?
Vacuum & pumping2
- With a CT-200 cryopump and an Oil based Edwards roughing pump[1]
Configuration & options14
- Features:[1]
- 2ea rotating ’shields’ that keep deposition and heat off of the belljar[1]
- A 4-pocket eGun and both a fixed shutter and a rotary shutter[1]
- The stage contains tapped holes so one may mount samples to it using screws and clips[1]
- The crystal monitor is very close to the stage[1]
- The thermal baskets all need to be replaced as they are expendable items[1]
- The unit includes an ion gauge[1]
- Features
- The stage contains tapped holes so one may mount samples to it using screws and clips[1]
- Known issue / consumable note
- The thermal baskets need to be replaced as they are expendable items[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the E 306 A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the E 306 A are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the E 306 A are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the E 306 A are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the E 306 A is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the E 306 A are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 3, 2026.