Waferpedia

Cascade Microtech

Summit 12000

The Cascade Microtech Summit 12000 is a probe station (prober) for semiconductor testing. The Summit 12000 handles 8-inch wafers and includes a temperature-controlled chuck ranging from -65°C to +200°C.[1][2]

Summit 12000 — Inventory photo
Fig. 01Summit 12000Inventory photo[3]

Performance

+/- 2 micron[1]

Optics

0.1 micron[1]

What it is

The Cascade Microtech Summit 12000 is a probe station used in semiconductor device characterization and test.[4][1][2][5][6]

The Summit 12000 is also referred to as a prober.[1][2][5][6]

How it works

The Summit 12000 uses a shielded chuck with an Attoguard Microchamber for controlled environmental measurements.[1]

Where it fits in the process flow

General reference — not yet source-verified

The Summit 12000 is used in the test and characterization step of the semiconductor manufacturing flow, after wafer fabrication and before final packaging.

Probe stations of this class allow electrical measurements on individual die or test structures on a whole wafer.

Applications

General reference — not yet source-verified

The Summit 12000 is used for device characterization, parametric testing, and failure analysis of semiconductor wafers.

What do the numbers mean?

Power & electrical1

Anritsu MG 3632 A Synthesized Signal Generator[4]
Accurate?

Wafer handling5

Wafer size
8 inch[1]
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Chuck type
200 mm thermal chuck with Temptronic temperature controller[1]
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Temperature
With Attoguard Microchamber & -65°C to 200°C Shielded Chuck[1]
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Temperature
200 mm thermal chuck with Temptronic temperature controller (range of -65°C to +200°C)[1]
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Thermal chuck
200 mm, range -65°C to +200°C, with Temptronic temperature controller[1]
Accurate?

Optics & imaging2

X-Y stage resolution
0.1 micron[1]
Accurate?
Microscope
Azoom microscope with single long working distance objective[1]
Accurate?

Performance1

X-Y stage accuracy
+/- 2 micron[1]
Accurate?

Control & software1

att Control Unit[4]
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Configuration & options10

HP Rack[4]
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Agilent 34401 Multimeters (7)[4]
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HP 83480 A Digital Communications Analyzer[4]
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Temperature range
–65 °C to +200 °C[2]
Accurate?
Supports up to 8 manipulators[2]
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Bridge travel
8″ × 5″[2]
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Manipulator capacity
up to 8 manipulators[2]
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Microchamber
Attoguard Microchamber[1]
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Vibration isolation
Vibration isolation table[1]
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Support for manipulators
up to 8[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationAnritsu MG 3632 A Synthesized Signal Generator[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the Summit 12000 support?

The Summit 12000 supports 8-inch wafers.[1][2]

How many manipulators does the Summit 12000 support?

The Summit 12000 supports up to 8 manipulators.[2]

What is the X-Y stage resolution of the Summit 12000?

The X-Y stage resolution is 0.1 micron.[1]

What is the X-Y stage accuracy of the Summit 12000?

The X-Y stage accuracy is plus or minus 2 micron.[1]

Not publicly documented

The following facts about the Summit 12000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Summit 12000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Summit 12000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Summit 12000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Summit 12000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Summit 12000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
  3. [3]Inventory photo
  4. [4]inventory listing
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
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Last updated Sep 29, 2026.

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