Cascade Microtech
M 150
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
Probe stations such as the M 150 provide a platform for making precision electrical measurements on semiconductor devices at the wafer level. The M 150 measurement platform allows for precision electrical measurements from DC to high-frequency RF. The M 150 system holds wafers in place by a vacuum chuck. An optical microscope allows for precise placement of manipulator test probes. The manipulators remain fixed while the wafer moves for multiple device testing on a die-by-die level. Manipulators are held in place by vacuum and have three-axis movement for fine probe placement. Probe cards may also be used in place of free-moving manipulators.[1]
Applications
The M 150 probe station is used for precision electrical measurements on semiconductor devices. The measurement platform supports DC and high-frequency RF testing. The M 150 is designed for applications in semiconductor device characterization and process development.[1]
What do the numbers mean?
Power & electrical1
Vacuum & pumping1
Wafer handling2
Optics & imaging1
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the M 150 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M 150 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the M 150 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the M 150 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the M 150 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the M 150 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]micro.fel.cvut.cz — micro.fel.cvut.czmicro.fel.cvut.cz
- [2]Equipment inventory listing
Last updated Sep 26, 2026.
