Bruker

Oltespa

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Oltespa — Inventory photo — Fig. 01OltespaInventory photo^[1]

Power

70 kHz nominal; 50-90 kHz range^[3]

Optics

7 nm nominal; 10 nm max^[3]

What it is

The Bruker Oltespa is a wafer prober.^[1]

How it works

General reference — not yet source-verified

Wafer probers use a precision positioning stage to bring one or more probe tips into contact with device electrodes on the wafer surface.

The probe tips are connected to external measurement instruments such as source-measure units or impedance analyzers, enabling parametric testing of devices.

Where it fits in the process flow

General reference — not yet source-verified

Wafer probers are employed after wafer fabrication to perform electrical characterization and parametric testing of devices on the wafer.

Applications

General reference — not yet source-verified

Wafer probers are used to measure parameters such as current-voltage curves, contact resistance, breakdown voltage, and capacitance.

What do the numbers mean?

Power & electrical1

Frequency: 70 kHz nominal; 50-90 kHz range^[3]

Wafer handling1

Substrate material: N-type doped silicon; resistivity 0.01-0.02 Ω·cm^[4]

Optics & imaging2

Tip radius: 7 nm nominal; 10 nm max^[3]
Reflective coating: 100 nm Al on backside^[4]

Dimensions & facilities2

Cantilever width: 40 µm nominal; 38-42 µm range^[3]
Tip height: 14 µm nominal; 9-19 µm range^[3]

Configuration & options13

Category: Test & Probe^[2]
Model: Oltespa^[1]
Tool type: Prober^[1]
Probe model: OLTESPA-R4^[3]
Probe geometry: Rectangular^[3]
Spring constant: 2 N/m nominal; 0.6-3.5 N/m range^[3]
Cantilever length: 240 µm nominal; 225-255 µm range^[3]
Cantilever thickness: 2.3 µm nominal; 1.6-3.0 µm range^[3]
Cantilever material: Silicon^[3]
Back-side coating: Reflective Al^[3]
Front angle: 0°^[3]
Back angle: 35°^[3]
Side angle: 18°^[3]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Frequency70 kHz nominal; 50-90 kHz range^[3]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Bruker Oltespa?

The Bruker Oltespa is a prober used for semiconductor test.^[1]

Who manufactures the Bruker Oltespa?

The Bruker Oltespa is manufactured by Bruker.^[1]

Not publicly documented

The following facts about the Oltespa are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Oltespa are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Oltespa are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Oltespa are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Oltespa are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Oltespa is not on record.
Answerable by: an OEM datasheet or a fab qualification report