Aixtron

G 4 MOCVD

Deposition Aixtron G 4 MOCVD family

Research Quality: 30% complete

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G 4 MOCVD — Inventory photo — Fig. 01G 4 MOCVDInventory photo^[1]

Power

208V^[1]

Vacuum

Main pump^[1]

What is it?

The Aixtron G 4 MOCVD is a metal organic chemical vapor deposition system described with 4-inch wafer size support.

What do the numbers mean?

Power & electrical3

Voltage: 208V^[1]
Phase: 3 Phase^[1]; RF generator^[1]

Vacuum & pumping1

Main pump^[1]

Accurate?

Configuration & options8

Process: EPI^[1]
Process gasses: NH3, H2, SiH4^[1]; With:^[1]; Glove box^[1]; GMS^[1]; Particle filter^[1]; Cable box^[1]; Transformer^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage208V^[1]
Phase3 Phase^[1]
ConfigurationMain pump^[1]
ConfigurationRF generator^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Aixtron G 4?

It is a metal organic chemical vapor deposition (MOCVD) deposition system.^[1]

Not publicly documented

The following facts about the G 4 MOCVD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the G 4 MOCVD are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the G 4 MOCVD are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the G 4 MOCVD are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the G 4 MOCVD are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the G 4 MOCVD is not on record.
Answerable by: an OEM datasheet or a fab qualification report