Waferpedia

Tool family

Zeiss Axiotron 300

Models in this family

  1. The Zeiss Axiotron 300 is an automated optical inspection microscope for wafer inspection and review, supporting 200 mm and 300 mm wafer sizes with brightfield, darkfield, and DIC observation.

    Cited variants

    DesignationGenerationVintageChangesSource
    Axiotron 300 AOI———waferpedia.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com