SVG 8800

Models in this family

1. 

   8800

   The SVG 8800 is a single-track photoresist coater and developer system for semiconductor wafer processing.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Dual Coat with Soft Bake	—	—	Configured for 8 inch wafers and includes dual coat and soft bake capability.	Equipment inventory listing[1]
   3-Resist Configuration with EBR and Backside Cleaning	—	—	Set up for 6 inch wafers with three resist lines, edge bead removal, and backside cleaning.	Equipment inventory listing[2]

Sources