Tool family
The SUSS MJB 3 Mask Aligner is a lithography system designed for 3-inch wafers, using a 350W Hg lamp and UV400 near UV optics with 0.6 µm resolution.
The SUSS MJB 4 Mask Aligner is a mask aligner used for contact exposure and alignment, with source-stated support for wafers up to 4 inches in diameter.
The SUSS MJB 3 Mask Aligner is a lithography system designed for 3-inch wafers, using a 350W Hg lamp and UV400 near UV optics with 0.6 µm resolution.
The SUSS MJB 4 Mask Aligner is a mask aligner used for contact exposure and alignment, with source-stated support for wafers up to 4 inches in diameter.