SUSS MicroTec MA 8 Mask

Models in this family

1. 

   MA 8 BA 8 Gen 5 S Compact Mask

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   MA 8 / BA 8 Gen 5 S	Gen 5 S	—	—	Equipment inventory listing[1]

2. 

   MA 8 BA 8 Mask

   The SUSS MA 8 / BA 8 Mask Aligner is a backside optical alignment system with manual wafer loading and unloading.

3. 

   MA 8 Gen 3 Mask

   The SUSS MA 8 Gen 3 Mask Aligner is a lithography tool for 8-inch wafers.

4. 

   MA 8 Mask

   The SUSS MA 8 is a mask aligner used for photolithography, supporting 8-inch wafers with a full-spectrum lamp and optical sensors for 405 nm and 365 nm.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Gen 2	Gen 2	—	Described as a SUSS MA 8 Mask Aligner Gen 2; one source says it includes TSA and BSA.	Equipment inventory listing[2]
   Gen 4	Gen 4	—	Described as a SUSS MA 8 Mask Aligner Gen 4; one source says it is equipped for TSA 2018 Vintage.	Equipment inventory listing[3]
   MA 8 Mask Aligner - Gen 2 - with TSA & BSA	Gen 2	—	Stated as Gen 2 with TSA and BSA.	Equipment inventory listing[2]
   MA 8 Mask Aligner - Gen 4 - Equipped for TSA 2018 Vintage	Gen 4	2018	Stated as Gen 4 and equipped for TSA 2018 vintage.	Equipment inventory listing[3]
   MA 8 Gen 2	Gen 2	—	Includes TSA and BSA alignment systems; optical sensor for 405 nm and 365 nm; full spectrum lamp; available for 8-inch wafers.	Equipment inventory listing[4]
   MA 8 Gen 2 with TSA&BSA	Gen 2	—	Includes TSA (Top Side Alignment) and BSA (Bottom Side Alignment) systems.	Equipment inventory listing[2]
   MA 8 Gen 4	Gen 4	2018	Equipped with TSA (Top Side Alignment) system; Gen 4 configuration.	Equipment inventory listing[3]
   MA 8	Gen 4	—	Equipped for TSA 2018 Vintage.	Equipment inventory listing[3]

Sources