Waferpedia

Tool family

Strasbaugh 6 Y 1

StrasbaughCMP1 entry

Strasbaugh 6 Y 1 Grinder Polisher.

Models in this family

  1. The Strasbaugh 6 Y 1 is a chemical mechanical planarization (CMP) system, a class of machine used to polish and planarize semiconductor wafers during integrated circuit fabrication.