Semitool ST 860 SRD

Models in this family

1. ST 860 SRD

   The Semitool ST 860 (also designated ST-860) is a spin rinse dryer (SRD) used for processing wafers of sizes 2, 3, 4 inch, and available in a double stack configuration handling wafers up to 125 mm.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   ST-860 SRD Double Stack	—	—	Double stack configuration of the ST-860 SRD	fabsurplus.com[1]

Sources