Waferpedia

Tool family

Semitool 270 SRD

Semitool1 entry

Models in this family

  1. The Semitool 270 SRD is a spin rinse dryer for wafer processing.

    Cited variants

    DesignationGenerationVintageChangesSource
    Semitool 270 SRD with 6" rotor——Configured with a 6-inch rotorsemistarcorp.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]semistarcorp.comsemistarcorp.com