Waferpedia

Tool family

Pfeiffer TPH

Pfeiffer2 entries
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Models in this family

  1. TPH 10 HU Turbo

    Pfeiffer TPH 10 HU Turbo is a turbomolecular pump that includes a TCP 380 controller and cables.

  2. TPH 170 Turbomolecular Vacuum

All entries

  1. TPH 10 HU TurboPfeiffer

    Pfeiffer TPH 10 HU Turbo is a turbomolecular pump that includes a TCP 380 controller and cables.

    5 specs
  2. TPH 170 Turbomolecular VacuumPfeiffer
    CategoryLab & Support Equipment
    4 specs