Novellus 3290

Models in this family

1. 

   3290

   The Novellus / Varian 3290 is a PVD sputter physical vapor deposition system for 6-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Novellus / Varian 3290 STQ	—	—	A sputtering system designed for 6-inch wafers.	waferpedia.com[1]

2. 

   3290 STQ

   The Novellus / Varian 3290 STQ is a sputtering system designed for 6-inch wafers.

Sources