Waferpedia

Tool family

Mattson AST 2800

MattsonThermal / Diffusion3 entries
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Models in this family

  1. AST 2800

    The Mattson AST 2800 is a thermal processing tool in the AST 2800 family.

  2. AST 2800 RTP
  3. AST 2800 SMIF RTP

All entries

  1. AST 2800Mattson

    The Mattson AST 2800 is a thermal processing tool in the AST 2800 family.

    11 specs
  2. AST 2800 RTPMattson
    CategoryThermal / Diffusion
    1 spec
  3. AST 2800 SMIF RTPMattson
    CategoryThermal / Diffusion
    5 specs