Waferpedia

Tool family

Laurell Lz-23 B

LaurellResist Processing1 entry

The Laurell Lz-23 B is a 650-series spin coater that accepts substrates up to 150mm (5×5 inches) and spins up to 12000 rpm.

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Models in this family

  1. Lz-23 B

    The Laurell Lz-23 B is a 650-series spin coater that accepts substrates up to 150mm (5×5 inches) and spins up to 12000 rpm.