Tool family
The Gaertner L116SF is an ellipsometer used to measure film thickness. The Gaertner L116SF was equipped with a He-Ne laser at 632.8 nm and set at an incident angle of 70°.
The Gaertner L116SF is an ellipsometer used to measure film thickness. The Gaertner L116SF was equipped with a He-Ne laser at 632.8 nm and set at an incident angle of 70°.