Waferpedia

Tool family

Filmetrics F10-VC

The Filmetrics F10-VC is a simultaneous reflectance and transmittance measurement instrument with optional thickness and index measurement modules.

Models in this family

  1. F10-VCproduced 2008–

    The Filmetrics F10-VC is a simultaneous reflectance and transmittance measurement instrument with optional thickness and index measurement modules.

    Cited variants

    DesignationGenerationVintageChangesSource
    F10-VC-UV——Thickness range 1 nm–50 µm; wavelength range 200–1100 nm.web.archive.org[1]
    F10-VC-NIR——Thickness range 100 nm–100 µm; wavelength range 950–1700 nm.web.archive.org[1]
    F10-VC-EXR——Thickness range 15 nm–100 µm; wavelength range 380–1700 nm.web.archive.org[1]
    F10-VC——Base model with 15 nm-70 µm thickness range and 380-1050 nm wavelength range.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org