Tool family
The EV Group 40 NT is an automated measurement system for metrology applications in semiconductor manufacturing, especially lithography and bonding.
The EVG 40 Top-to-Bottom Side Measurement System is a PC-based measurement system for 2-inch to 8-inch wafers and substrates, with a manual alignment stage and 120-230 V, 50/60 Hz power input.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| EVG 40NT | — | — | — | web.archive.org[1] |
The EV Group 40 NT is an automated measurement system for metrology applications in semiconductor manufacturing, especially lithography and bonding.
The EVG 40 Top-to-Bottom Side Measurement System is a PC-based measurement system for 2-inch to 8-inch wafers and substrates, with a manual alignment stage and 120-230 V, 50/60 Hz power input.