Waferpedia

Tool family

Espec EHS-222M-L

The EHS-222M-L is an ESPEC large highly accelerated stress test system. The EHS-222M-L has an interior dimension of φ394×L626 mm.

Models in this family

  1. The EHS-222M-L is an ESPEC large highly accelerated stress test system. The EHS-222M-L has an interior dimension of φ394×L626 mm.