Waferpedia

Tool family

Denton Vacuum Integrity 14 Thermal

Denton VacuumDeposition1 entry

Denton Vacuum Integrity 14 Thermal Evaporator.

LinkedIn X Email

Models in this family

  1. Integrity 14 Thermal

    The Denton Integrity 14 Thermal is a thermal evaporation coating system used for depositing metal and alloy thin films on various substrates in semiconductor, optics, and research applications.