Denton Vacuum Discovery

Models in this family

1. 

   Discovery

   The Denton Vacuum Discovery series is a family of highly configurable magnetron sputter deposition systems for thin film coating.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Discovery 200	—	—	Up to 200 mm substrates; up to four 4" confocal cathodes; tri-axis adjustment; coating uniformity < +/-5%	info.dentonvacuum.com[1]
   Discovery 300	—	—	Up to 300 mm substrates; up to three 6" confocal cathodes; tri-axis adjustment; coating uniformity < +/-5%	info.dentonvacuum.com[1]
   Discovery V	—	—	Planar magnetron; up to 200 mm substrates; coating uniformity < +/-2%	info.dentonvacuum.com[1]
   Discovery I	—	—	Inverted cylindrical magnetron; up to 200 mm substrates; coating uniformity < +/-0.25%	info.dentonvacuum.com[1]
   Discovery 635	—	—	Maximum substrate up to 8" diameter; options include RF etch/bias, water cooled table, reactive flow control, substrate flip, in-situ ellipsometry	info.dentonvacuum.com[2]
   Discovery 785	—	—	Maximum substrate up to 30" diameter; options include RF etch/bias, water cooled table, reactive flow control, substrate flip, in-situ ellipsometry	info.dentonvacuum.com[2]

2. 

   Discovery 18

   Denton Discovery 18 is a sputter deposition system for metals, alloys, and insulating thin films with user-configurable deposition settings.

3. 

   Discovery Cathode

   The Denton Discovery Cathode Deposition System is a 12.0-inch sputtering system with planetary load lock and robot loading assemblies.

Sources