Tool family
The Denton 635LL is listed as a sputtering system with four cathodes, RGA, OES-feedback reactive oxygen or nitrogen sputtering, a heated/cooled chuck to 500C, co-sputtering, and capability for substrates up to 200mm diameter.
The Denton 635LL is a four-cathode sputter deposition system that coats substrates up to 200 mm in diameter.