Waferpedia

Tool family

ASML TWINSCAN NXE:3600D

ASMLLithography1 entry

The TWINSCAN NXE:3600D is an EUV lithography system for high-volume production of advanced Logic and DRAM chips.

Models in this family

  1. The TWINSCAN NXE:3600D is an EUV lithography system for high-volume production of advanced Logic and DRAM chips.