Waferpedia

Tool family

Applied Materials Endura

Models in this family

  1. The Applied Materials Endura is a physical vapor deposition (PVD) system for semiconductor manufacturing, supporting wafer sizes from 6 to 12 inches and configured with various process chambers for metals such as copper, gold, titanium tungsten, and nickel.

  2. The Applied Materials Endura 1 is a 12-inch wafer metal processing tool.

  3. Applied Materials Endura 2 is a 12-inch PVD (physical vapor deposition) system used for liner/barrier and front-end metallization applications.

  4. Applied Materials Endura 2 Chambers is a semiconductor equipment item with Chamber A without heater, Chamber B with heater, and Chamber C without heater.

  5. Applied Materials Endura 4.0 is a PVD (Physical Vapor Deposition) system with 25-wafer FOUP loadports.

  6. The Applied Materials Endura CL is a semiconductor processing chamber offered in Preclean, Degas STD, and ESIP TAN (No Target) configurations.

    Cited variants

    DesignationGenerationVintageChangesSource
    Preclean—2002—Equipment inventory listing[1]
    ESIP TAN (No Target)———Equipment inventory listing[2]
    Degas STD———Equipment inventory listing[3]
    ESIP TAN——ESIP TAN chamber without targetEquipment inventory listing[2]
  7. The Applied Materials Endura CL Versa is a physical vapor deposition system from the Endura family, configured with TTN 3CH + Degas STD 2CH.

  8. Applied Materials Endura HP is a PVD sputter physical vapor deposition system.

All entries

  1. EnduraApplied Materials

    The Applied Materials Endura is a physical vapor deposition (PVD) system for semiconductor manufacturing, supporting wafer sizes from 6 to 12 inches and configured with various process chambers for metals such as copper, gold, titanium tungsten, and nickel.

    CategoryDeposition
    32 specs
  2. Endura 1Applied Materials

    The Applied Materials Endura 1 is a 12-inch wafer metal processing tool.

    CategoryDeposition
    3 specs
  3. Endura 2Applied Materials

    Applied Materials Endura 2 is a 12-inch PVD (physical vapor deposition) system used for liner/barrier and front-end metallization applications.

    CategoryDeposition
    36 specs
  4. Endura 2 ChambersApplied Materials

    Applied Materials Endura 2 Chambers is a semiconductor equipment item with Chamber A without heater, Chamber B with heater, and Chamber C without heater.

    5 specs
  5. Endura 4.0Applied Materials

    Applied Materials Endura 4.0 is a PVD (Physical Vapor Deposition) system with 25-wafer FOUP loadports.

    CategoryDepositionWafer25-wafer FOUP Loadports (3)
    9 specs
  6. Endura CLApplied Materials

    The Applied Materials Endura CL is a semiconductor processing chamber offered in Preclean, Degas STD, and ESIP TAN (No Target) configurations.

    CategoryDeposition
    32 specs
  7. Endura CL VersaApplied Materials

    The Applied Materials Endura CL Versa is a physical vapor deposition system from the Endura family, configured with TTN 3CH + Degas STD 2CH.

    CategoryDeposition
    1 spec
  8. Endura HPApplied Materials

    Applied Materials Endura HP is a PVD sputter physical vapor deposition system.

    CategoryDeposition
    10 specs

Sources

Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing