Comparison ledger
Lam Research IPEC 472, SCREEN AS 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IPEC 472Lam Research | AS 2000SCREEN |
|---|---|---|
| OEM | Lam Research | SCREEN |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research IPEC 472 | SCREEN AS 2000 |
| Specifications | ||
| Configuration | Surface Automated[1] | Dual brush and top side brush chambers, spin dry[4] |
| Wafer size | 6 inch, 8 inch[2] | — |
| Category | CMP (Chemical Mechanical Polisher / Chemical Mechanical Planarization)[1] | — |
| Make / OEM | Lam / IPEC[1] | — |
| Model | 472[1] | — |
| Gas | — | 1:100 DHF, 1:100 NH4OH[4] |
| OS | — | Windows NT[4] |
| Power | — | 0.750KVA transformer[5] |
| Missing | — | HLS cards / condition not well[5] |
| Wafer Size | — | 8 inch[6] |
| Brush Chambers | — | Dual brush and top side brush chambers[4] |
| Spin Dry | — | Yes[4] |
| Process Gases | — | 1:100 DHF, 1:100 NH4OH[4] |
| Operating System | — | Windows NT[4] |
| Vintage Year (example unit) | — | 1998[4] |
| Vintage Year (another unit) | — | 1999[5] |