Comparison ledger
KLA .204 PSL Wafer, Nikon Optiphot, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | OptiphotNikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Nikon Optiphot |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[3] | with Camera[5] |
| Wafer Size | 8 inch[3] | — |
| Traceability | NIST[4] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[3] | — |
| NIST Traceable | Yes[3] | — |
| Objective Magnifications | — | 10x and 40x (standard)[6] |
| Light Source | — | 12V 100W incandescent (Osram); LED retrofit available[1] |
| Imaging Modes | — | Brightfield, Darkfield[1] |
| Built-in ND Filter | — | Yes[1] |
| Adjustable Iris Diaphragm | — | Yes[1] |
| Camera | — | Available (optional)[5] |
| Manufacturer | — | Nikon[5] |
| Model | — | Optiphot[5] |
| Included optics | — | 10x and 40x objectives; 100x damaged[6] |
| Identifier | — | s/n 331291 (base) and 249176 (optics)[6] |
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