Waferpedia

Comparison ledger

1007versusFour Point

KLA 1007, Veeco Four Point, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMKLAVeeco
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Veeco Four Point
Cited variants—
Specifications
ManufacturerKLA[3]—
Model1007[3]—
DescriptionWafer Prober[3]—
Wafer size150 mm[3]—
Convertible to 8 inch wafer sizeYes[3]—
Vintage01.06.1995[3]—
MakeKLA[4]—
Equipment typeProber[4]—
Function—Resistivity and sheet resistance measurement[1]
Penetrate voltage—170 V short pulse[1]
Semiconductor type determination—N or P type[1]
Measurement—Resistivity[1]
Model designation—FP-100[1]
Measurement modes—Sheet resistance, bulk resistivity, thickness, type test[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]fabweb.ece.illinois.edufabweb.ece.illinois.edu
  2. [2]aggiefab.tamu.eduaggiefab.tamu.edu
  3. [3]fabsurplus.comfabsurplus.com
  4. [4]Equipment inventory listing