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017-0024-01 PrealignerversusMA 8 Mask

Brooks 017-0024-01 Prealigner, SUSS MicroTec MA 8 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
MA 8 MaskSUSS MicroTec
OEMBrooksSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerSUSS MicroTec MA 8 Mask
Cited variants—
  • Gen 2Gen 2[1]
  • Gen 4Gen 4[2]
  • MA 8 Mask Aligner - Gen 2 - with TSA & BSAGen 2[1]
  • MA 8 Mask Aligner - Gen 4 - Equipped for TSA 2018 VintageGen 4[2]
  • MA 8 Gen 2Gen 2[3]
  • MA 8 Gen 2 with TSA&BSAGen 2[1]
  • MA 8 Gen 4Gen 4[2]
  • MA 8Gen 4[2]
Specifications
Configuration—Gen 2[3]
Light Source—Full spectrum lamp[3]
Wafer size—8 inch[3]
Optical sensor wavelengths—405 nm and 365 nm[3]
OEM—SUSS[3]
Model—MA 8[3]
Equipment type—Mask Aligner[3]
017-0024-01 Prealigner entryMA 8 Mask entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing