Comparison ledger
Axcelis GSD 200 E High Current, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | GSD 200 E High CurrentAxcelis | |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis GSD 200 E High Current | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Wafer size (variant 1) | 8 inch[1] | — |
| Wafer size (variant 2) | 6 inch[2] | — |
| Type | High Current Ion Implanter[1] | ESC Platen ADV-S Type[3] |
| Configuration | — | Platen ADV-S Type[3] |
| Category | — | Ion Implantation[4] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →