Comparison ledger
Axcelis 200 ACU, Plasma-Therm SLR 770 ICP Deep Silicon, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | SLR 770 ICP Deep SiliconPlasma-Therm |
|---|---|---|
| OEM | Axcelis | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Plasma-Therm SLR 770 |
| Specifications | ||
| Configuration | Parts Machine[1] | Load lock shuttle lock transfer[5] |
| Manufacturer | Axcelis[1] | Plasma-Therm[5] |
| Model | 200 ACU[1] | SLR 770[5] |
| Tool type | Asher[1] | Single-chamber inductively coupled plasma etcher[6] |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Process Gas | — | O2, Ar, SF6, C4F6[5] |
| Chiller | — | Neslab HX300[5] |
| Power Box | — | Square D[5] |
| Category | — | Etch[5] |
| Wafer sizes | — | 4 inch[5] |
| Wafer handling | — | Load lock shuttle lock transfer[5] |
| Load lock | — | Single wafer semi-auto load lock[7] |
| Application | — | Deep silicon etch[7] |
| Gas box | — | Horiba SEC-E40 (4)[5] |
| Process gases | — | O2, Ar, SF6, C4F6[5] |
| Controller and RF generator | — | RF Power Products RFPP I22050001 & I20050007[5] |
| Adaptive pressure controller | — | VAT PM-5[5] |
| Heater controller | — | Plasmatherm PC OS[5] |
| RF generator | — | RF Power Products RFPP RF5S & AM-5[5] |
| Turbo pump and controller | — | Leybold MAG 2000; Leybold MD 2000[5] |
| Vintage | — | 01.06.1998[7] |
| Power | — | 1.0 kW ICP RF package; 2 kW generator limited to 1.0 kW; 500 W RF bias[7] |
| Gas box lines | — | 5 lines[7] |
| Additional process gases | — | CHF3, C4F8, SF6, Ar, O2[7] |
| Dry pump | — | Edwards ih80[7] |
| Load lock dry pump | — | Edwards nxds[7] |
| Load lock turbo pump | — | Leybold[7] |
| Turbo pump | — | Edwards STPA-1303CV[7] |
| Electrical | — | 380VAC 3 phase[7] |
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