Comparison ledger
ASML 5500/80, EV Group 101, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 5500/80ASML | 101EV Group |
|---|---|---|
| OEM | ASML | EV Group |
| Category | Lithography | Lithography |
| Wafer size | 4-inch wafers; convertible to 3-inch or 6-inch platforms | — |
| Process node | 500nm resolution | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | i-Line | — |
| Family | ASML 5500/80 | EV Group 101 |
| Specifications | ||
| Resolution | 500nm[1] | — |
| Alignment accuracy | <70nm[1] | — |
| Wafer setup | Set up for 4-inch wafers[1] | — |
| Convertible platforms | 3-inch or 6-inch platforms[1] | — |
| Field size | 21mm x 21mm[1] | — |
| Depth of focus | 1.3µm[1] | — |
| Category | Lithography[2] | — |
| Wafer size | 4-inch wafers; convertible to 3-inch or 6-inch platforms[1] | — |
| Generation | i-line[3] | — |
| OEM | — | EV Group[4] |
| Model | — | 101[4] |
| Equipment name | — | EVG 101 Spray Coater[4] |
| NEMO ID | — | evgspraycoat[4] |
| Training required | — | EVG 101 Training[4] |
| Training duration | — | 1.50 hours[4] |
| Processing technique | — | Resist Spray Coat (manual)[4] |
| Cleanliness | — | "All"[4] |
| Location | — | SNF Paul G Allen L107 Cleanroom[4] |
| Wafer diameter (substrate size) | — | up to 300 mm[5] |
| Available modules | — | Spin coat / OmniSpray® / develop[5] |
| Wafer handling options | — | Bowed / warped / thin wafer handling, edge handling[5] |
| Dispense options | — | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[5] |
| Processing technique (at SNF) | — | Resist Spray Coat (manual)[6] |
| Cleanliness group (at SNF) | — | "All"[4] |
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