Waferpedia

Comparison ledger

0041-39086 ESC PartversusR 4420 XL Poly

Applied Materials 0041-39086 ESC Part, Lam Research R 4420 XL Poly, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
R 4420 XL PolyLam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research R 4420 XL Poly
Specifications
OEM—Lam[1]
Type—Poly Etcher[1]
Wafer Sizes—6, 8 inch[1]
Vintage—1994[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing