Comparison ledger
Applied Materials 0021 20868 Part, YES 253B-2-3CF-2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0021 20868 PartApplied Materials | 253B-2-3CF-2YES |
|---|---|---|
| OEM | Applied Materials | YES |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | Legacy |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0021 20868 Part | YES 253B-2-3CF-2 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Bar, Bus, Gnd, Turbo Cb Encl, Gen Rack,[2] | — |
| Product name | — | MKS Type 253B Exhaust Throttle Valve[1] |
| Valve type | — | butterfly valve[1] |
| Function | — | regulates the removal of gas from a vacuum chamber; sealing versions can shut off the removal of gas[1] |
| Compatible controllers | — | Type 651, 652, 152G, or 252 (revision D or later) controllers[1] |
| Flange types | — | ASA, KF Style ISO, NW Style ISO, CF, JIS[1] |
| Connector | — | 15-pin Type "D" connector[1] |
| Mounting orientation | — | pump label oriented towards the high vacuum pump during installation[1] |
| External leakage at shaft seal | — | 1 x 10^-7 scc/sec He[1] |
| Materials exposed to process | — | 316L SS, Viton[1] |
| Valve body operating temperature | — | 0° to 90° C (32° to 194° F) max.[1] |
| Valve motor ambient operating temperature | — | 0° to 70° C (32° to 158° F) max.[1] |
| Differential pressure across valve | — | 1 atm. (15 psig) max.[1] |
| Driver/gear assembly width | — | 3.75 in. square (95 mm)[1] |
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