Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Bruker Dektak XT Stylus, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | Dektak XT StylusBruker |
|---|---|---|
| OEM | Applied Materials | Bruker |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Bruker Dektak XT Stylus |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | — |
| Stylus Force Range | — | 1 - 15 mg[2] |
| Tip Diameter | — | 12.5 µm[2] |
| Vertical Resolution | — | 1 Å max. (0.1 nm)[2] |
| Vertical Range | — | 1 mm (0.039 in.)[2] |
| Scan Length Range | — | 55 mm (2 in.)[2] |
| Step Height Repeatability | — | <5 Å, 1σ on 0.1 µm step[2] |
| Data Points Per Scan | — | 120,000 maximum[2] |
| Sample X/Y Stage | — | Manual 100 mm X/Y, manual leveling[2] |
| Maximum Sample Thickness | — | 50 mm (1.95 in.)[2] |
| Maximum Wafer Size | — | 200 mm (8 in.)[2] |
| Software | — | Vision 64[2] |
| Power Input | — | 100 - 240 VAC, 110 VA max[3] |
| Stylus Type | — | Diamond-tipped[3] |
| Measurement Principle | — | Electromechanical, LVDT[3] |
| Optional Stylus Tips | — | 2.0 µm and 12.5 µm radius[4] |
| Stylus Tip Radii Available | — | 2.0 μm and 12.5 μm[4] |
| Measurement Capability | — | 2D and 3D surface profiling[4] |
| Vintage | — | 2018[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →