Waferpedia

Comparison ledger

E 500versus160 XP

Agilent E 500, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
E 500Agilent
160 XPVarian
OEMAgilentVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent E 500Varian 160 XP
Cited variants
Specifications
ConfigurationMedium Current[3]—
ManufacturerAgilent[4]—
CategoryIon Implantation[4]—
Wafer size8 inch[3]—
TypeMedium current ion implanter[4]—
Vintage1996 vintage[3]—
Configuration (160 XP Ion variant)—150mm High Current IMP[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com