Comparison ledger
Thermo Fisher 1300 Series Safety, Veeco Waferstorm M 3305 Lift Off, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | |
|---|---|---|
| OEM | Thermo Fisher | Veeco |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | Robotic Wafer Handler: |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | Veeco Waferstorm |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Class II[2] | 300 Series[1] |
| Cabinet type | Class II, Type A2 biological safety cabinet[3] | — |
| Airflow compensation | SmartFlow airflow compensation system[3] | — |
| Motors | Dual DC motors[3] | — |
| Front window design | SmartClean front window design[3] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[3] | — |
| UV light | Programmable UV light[3] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[3] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[3] | — |
| Front opening choices | 8-inch or 10-inch front opening[3] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[4] | — |
| Certification | NSF/ANSI 49, UL, CE[4] | — |
| Service valves | Up to 6 total, 3 on each side wall[4] | — |
| Spin Chuck | — | 150 mm (Centrifugal Edge Grip)[1] |
| Voltage | — | 415 VAC[5] |
| Frequency | — | 50 Hz[5] |
| Phase | — | 3 Phase[5] |
| Wafer Size | — | 150 mm[1] |
| Power Requirements (Listing 1) | — | 415 VAC, 50 Hz, 3 Phase, 30 A[6] |
| Power Requirements (Listing 2) | — | 415 VAC, 50 Hz, 3 Phase[5] |
| Vintage (Listing 2) | — | 2010[5] |
| Vintage (Listing 3) | — | 2010[6] |
| Spin Chuck Type | — | 150 mm Centrifugal Edge Grip[1] |
| Cassette Loading | — | Qty 2 Horizontal Cassette Loading with 2 MCPs (8 total 150 mm Cassettes)[1] |
| Operating System | — | Windows 10[1] |
| SECS/GEM | — | Yes[1] |
| ESD Configuration | — | UPLA Filter with Air Ionizer Bar (Standard ESD Configuration)[1] |
| Fire Suppression | — | CO2 Fire Suppression System for 180" Frame: IR Detector, 120 Degrees Viewing Angle & Linear Heat Detector Wire[1] |
| Wafer size | — | Robotic Wafer Handler:[1] |
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