Waferpedia

Comparison ledger

.204 PSL WaferversusNewview 7300 3D

KLA .204 PSL Wafer, Zygo Newview 7300 3D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAZygo
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferZygo Newview 7300
Specifications
ConfigurationNIST Traceable[1]P/N 6301-0401-01[4]
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
P/N—6300-0593-01[3]
Motor Controller Box—3 Axis NV Elect Assy Z[4]
Licenses—Metro Pro 9.1, Film Analysis[4]
Software Version—MetroPro 9.1.4[4]
Operating System—Windows 7 Pro[4]
Field Zoom Lens Sizes—0.5X, 1X, 2X[4]
Objective Lens Included—5X, 20X, 50X[4]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]inventory listing