Comparison ledger
KLA .204 PSL Wafer, KLA P-20H, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-20HKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | Legacy |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA P-20H |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| Tool type | — | Stylus profilometer[3] |
| Stylus tip radius | — | 2 µm[3] |
| Stylus cone angle | — | 60°[3] |
| Vertical range | — | 325 µm[3] |
| Sensor element | — | Capacitive sensor element[3] |
| Motion stage | — | Precision motion stage[3] |
| Vertical resolution | — | Roughly nm scale[3] |
| Stage movement | — | 8 inch[3] |
| Serial number | — | 09940111[3] |
| Tool owner | — | Joseph Jacob[3] |
| Access mode | — | Walk-up tool (no reservation needed)[3] |
| S/N | — | 09940111[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →