Comparison ledger
KLA .204 PSL Wafer, KLA Candela 8520 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA Candela 8520 |
| Specifications | ||
| Configuration | NIST Traceable[1] | for SiC Wafers[3] |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| Phase | — | 1 Phase[3] |
| OEM | — | KLA[3] |
| Model | — | Candela 8520[3] |
| Equipment type | — | Surface inspection system[3] |
| Category | — | Metrology & Inspection[4] |
| Wafer sizes | — | 6-inch, 8-inch[3] |
| Wafer handling | — | for SiC wafers[4] |
| Generation | — | 2nd generation integrated surface and photoluminescence inspection system[5] |
| Inspection method | — | Automated wafer inspection with statistical process control (SPC) methodology[5] |
| Optical measurements | — | Scatter intensity, topographic variations, surface reflectance, phase shift, photoluminescence[5] |
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